The FizCam DUV dynamic laser interferometer provides accurate measurement of optics and optical systems at deep ultra-violet wavelengths for lithography applications.
The FizCam DUV incorporates a single camera, high-speed optical phase sensor that makes a wavefront measurement in less than 1 millisecond. Because acquisition time is so short, the FizCam DUV can measure accurately in environments with heavy vibration and air flow, as is typical of DUV compliant clean rooms.
Built to the stringent specifications of DUV optics manufacturing, FizCam DUV components are stainless/electroless nickel plated, and the laser path is entirely contained in a purged nitrogen environment.
Motorized controls include 2X discrete optical zoom, focus, polarization, input beam alignment, transmission flat tip/tilt and optional return flat tip/tilt.