Ags-Tech Inc

microelectromechanical systems (mems) design: mems are tiny chip scale micromachines made up of components between 1 to 100 micrometres in size (i. E. 0. 001 to 0. 1 mm) and mems devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors. At these size scales, the standards of classical physics are not always useful. Due to mems' large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass.
mems became practical once they could be fabricated using modified semiconductor device fabrication technologies, normally used to make electronics. These include molding and plating, wet etching (koh, tmah) and dry etching (rie and drie), electro discharge machining (edm), thin film deposition and other technologies capable of manufacturing very small devices.