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Automated Chemical Refill System With Solvent Purge

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The ChemGuard Automated Chemical Refill System with Solvent Purge CG500 was developed for delivery of low volatility chemicals used in the CVD process such as TDMAT, TAETO, TBTDET, TEMAZ and CupraSelect. The CG500 is our four container system two chemical, one solvent and one recovery. The ChemGuard 500 Chemical Delivery System maintains chemical purity, provides comprehensive safety features and interlocks, and maximizes process uptime by supplying continuous chemical to the process tool.
Specific Features of the ChemGuard Automated Chemical Refill System CG500

  • Low volatility chemicals are removed in five quick purge cycles, no visible or microscopic residue remains in the plumbing
  • Automatic Solvent Purge cleans all internal plumbing required to change out all containers and clean the internal plumbing panels
  • Solvent available for cleaning house lines
  • Manual Solvent Purge will clean external plumbing and remove low volatility and highly reactive chemicals prior to opening and exposing house lines to atmosphere
  • Quick changeout of bulk and process chemical containers
  • 100percent chemical utilization with Air Products’ patented Ultrasonic Empty Level Sensor for reduced chemical cost of ownership
  • 110percent spill containment
  • Mechanically keyed fittings to ensure proper canister installation
  • Life Safety, facility alarm enabled
  • Significant footprint reduction 50percent
  • Universal bulk chemical container accommodation from 4 to 40
  • Can be easily configured software and hardware for the different requirements of low volatility chemicals and process tools

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