The JSM-6701F is a field emission scanning electron microscope (FESEM) incorporating a cold cathode field emission gun, ultra high vacuum, and sophisticated digital technologies for high resolution high quality imaging of micro structures. Featuring a conical FE gun and a semi-in-lens objective lens, the system is capable of high resolution imaging as well as high quality real time image display at all scan speeds, enabling observation and recording of superior images even in a bright room. The JSM-6701F is able to handle samples up to 8 inches in diameter.
The JSM-6701F is a super intelligent PC SEM assuring compatibility with future computer technologies. Its unique graphical user interface controls condition setup, motor stage drive, imaging, and data filing, assuring stable and reliable operation. Using Window® XP with superior networking as a host computer, the system facilitates the process from imaging to data processing under optimum conditions, allowing the operator to display real time images, save the data in an external PC through the network, retrieve and manipulate the data.
The JSM-7001F, Thermal Field Emission SEM, is the ideal platform for demanding analytical applications as well as those requiring high resolution and ease-of-use. The JSM-7001F has a large, 5-axis, fully eucentric, motorized, automated specimen stage, a one-action specimen exchange airlock, small probe diameter even at large probe current and low voltage, and expandability with ideal geometry for EDS, WDS, EBSP, and CL. The specimen chamber handles specimens up to 200mm in diameter. A new Windows® XP based computer interface allows for unprecedented ease of operation including function buttons that switch operation modes quickly and easily. Up to four live images can be simultaneously viewed, including signal mixing, and a single scan can record and store all four images at once. The JSM-7001F SEM also supports full integration of EDS, WDS, e-beam lithography, and an image database. Stage automation is standard with a 5-axis computer control of X, Y, Z Tilt and eucentric rotation. ...
Scanning Electron Microscope
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The JSM-7600F is a stateof- the-art thermal FE-SEM that successfully combines ultrahighresolution imaging with optimized analytical functionality. In addition, the JSM-7600F incorporates a large specimen chamber. This uniquely designed chamber, which accommodates a 200 mm diameter specimen, is optimized for a large variety of detectors for secondary electrons, backscattered electrons, EDS, WDS, EBSD, CL, etc. Features Ultrahigh resolution comparable to the cold cathode FE-SEM. In-Lens Thermal FEG. Aperture angle control lens automatically optimizes the spot size at both high and low currents for both analysis and imaging. High probe current up to 200 nA (at 15 kV) for various analytical purposes (WDS, EDS, EBSD, CL, etc.) Built-in r-filter enabling user selectable mixture of secondary electron and backscattered electron images. Gentle Beam mode for top-surface imaging, reduced beam damage and charge suppression. Eco design for energy conservation. ...