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The'O Valley 410, 555, Hogye-Dong, Dongan-Ku
Anyang, Gyeonggi-Do-431080, Korea+(82)-31-4791458
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  • lcd touch screen
  • wafer size: 12" or less
  • chamber material: pvc
  • 20 process programs
  • 10 steps per program (nozzle location settable)
  • moving chenical nozzle spraying evenly
  • spin motor: ac servo motor
  • spin rotation: max. 1500 rpm
  • rotation controller: plc
  • power supply: ac220v
  • n2 source: 0. 2mpa , 50l/min, ø6 connection
  • d. I water rinsing source: 0. 2mpa, 10l/min, pt 1/2 connection
  • drainage: 1 lines, pvc-25a
  • body size/ material: 1000wx600dx440h mm/pvc.

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