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Film Thickness Measurements

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  • Stage Size 370mm x 470 mm~
  • Measurement Range 1000~ 2.5 at Sub-micron size
  • Spot size ~ 0.2 x 0.2
  • Measurement Speed 14sec./Area
  • Application Areas Half-tone Measurement
  • All Capability of ST6000/7000
  • Function All Capabilities of ST6000
  • Fine Pattern Measurement
  • Auto Focusing
  • CCD Camera
  • Pattern Recognition
  • CIM Communication

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