MEMS is Micro Electro Mechanical System meaning technology for micro semiconductor processing. This technology is to integrate electric and mechanical parts into micro small size one, and MEMS means to fabricate a system with new function by combining mechanical structure and electric structure of micro scale together.
This system technologies are miniaturized systems which comprise sensor, actuators and electronic functions thereby opening up a whole range of new applications which would not be possible with purely microelectronic systems.
MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of micro electronics with the perception and control capabilities of micro-sensors and micro- actuators and expanding the space of possible designs and applications.
Bio-MEMS is one of the application related to biotechnology such as the Polymerase Chain Reaction (PCR) microsystems for DNA amplification and identification, micromachined Scanning Tunneling Microscopes (STMs), biochips for detection of hazardous chemical and biological agents, and microsystems for high-throughput drug screening and selection.