1.Can detect trace amounts of various semiconductor manufacturing gases.
2. Automatic stop pump function
3.Automatic gas exhaust mode
4.Equivalent to IP22 (in soft case)
Please make your specification by filling in the type of gas.
Ex: H2, AsH3, B2H6, SiH4,PH3
Detectable Leak Rate : H2: 5.07 × 10-7, AsH3: 2.53 × 10-7, B2H6: 1.01 × 10-7, SiH4: 2.53 × 10-7, PH3:1.52 × 10-7
Detectable gas Conc. :H2: 1.0ppm, AsH3: 0.5ppm, B2H6: 0.2ppm, SiH4: 0.5ppm, PH3: 0.3ppm
Sampling Method :Suction Type (Extracitive)
Response Time :10 sec
Operating Temp. :10 to 400C
Power Source :2X AA alkaline dry cells
Battery Life :Up to 12 hour
Weight :Approx. 190g (excluding batteries)