Sonosys

The transducer in the megasonic nozzle generates a megasonic wave, which is transmitted through a flowing liquid (e. G. : di-water) to the surface of the substrate. The megasonic energy is concentrated on a small point of 2 or 4 mm.
sonosys® megasonic nozzles are offered in the frequencies of new: 600 khz / 1 mhz / 2 mhz / 3 mhz and 4 mhz.

this tankless megasonic nozzle system provides advanced non contact cleaning processes.

application:
cleaning of single wafers, masks, lcd‘s, substrates and micro electro mechanical systems (mems), and with 600 khz also larger particles in the optic industry, from medical devices and sensors.