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2935, Boul. Industriel
Sherbrooke, Quebec-J1L2T9, Canada+(1)-819-8202204
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Low RF Terminal Unit

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Size (HXWXD) : 2.6X2.7X3.2
Electrical : 440-480 V-3ph
Inlet power: 50 kVA
Total gas flow : 80 slpm
Gas type: Ar, Ar/H2,O2,N2,Air, Ar/He
Operating pressure : 30-120 kPa
Applications:
* Nanopowders
* Coatings

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