The evaporator permits the evaporation of liquid precursor. The precursor will be pumped with a peristatic pump directly to the vaporiser and vaporised online by the evaporator at maximum temperature of 200 °C. The system allows continuous weight monitoring of the liquid precursor to allow precise adjustment on the feeding.
- Pulse suppression device to assure continuous vapor flow
- Atomization gas flow monitoring
- Vapor and gas backpressure monitoring
- Interlock with external equipments
- 220 V 50/60 Hz
- Weight monitoring