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5 Yrs
2935, Boul. Industriel
Sherbrooke, Quebec-J1L2T9, Canada+(1)-819-8202204
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Vapor Feeder

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The evaporator permits the evaporation of liquid precursor. The precursor will be pumped with a peristatic pump directly to the vaporiser and vaporised online by the evaporator at maximum temperature of 200 °C. The system allows continuous weight monitoring of the liquid precursor to allow precise adjustment on the feeding.

  • Pulse suppression device to assure continuous vapor flow
  • Atomization gas flow monitoring
  • Vapor and gas backpressure monitoring
  • Interlock with external equipments
  • 220 V 50/60 Hz
  • Weight monitoring


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